报告内容摘要

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Piezoelectric microelectromechanical systems (MEMS) are a growing research area with a diverse array of applications.  Piezoelectric thin films convert between electrical and mechanical energy, and so enable a wide array of sensors, actuators, transducers, and energy harvesters.  This presentation will overview design of the materials properties of piezoelectric MEMS for charge and voltage based sensors, high displacement actuators, and mechanical energy harvesters, with an emphasis on the relevant figures of merit. For example, energy harvesting devices using piezoelectrics would be useful for powering local sensor nodes.  It has been shown that a factor of 10 increase in the figure of merit is possible for domain-controlled PZT films, relative to AlN.  Integration of these films with polymer passive elastic layers and active electronics will be discussed.

 

报告人简介

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Prof.  Susan Trolier-McKinstry

美国宾州大学材料研究所

国际铁电器件领域知名专家

Susan Trolier-McKinstry is a professor of ceramic science and engineering, director of the W. M. Keck Smart Materials Integration Laboratory, and co-director of the Nanofabrication facility at the Pennsylvania State University.  Her main research interests include dielectric and piezoelectric thin films, the development of texture in bulk ceramic piezoelectrics, and spectroscopic ellipsometry. She is a fellow of the American Ceramic Society, an academician of the World Academy of Ceramics, a fellow of IEEE, and a member of the Materials Research Society. Nineteen people that she has advised/co-advised have gone on to take faculty positions around the world.

 

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